Plasma saniyalanw kɛcogo kɛrɛnkɛrɛnnenw

Plasma saniya/etching machines bɛ plasma bɔ ni u ye electrode fila bila minɛn datugulen dɔ kɔnɔ walasa ka kuran foro dɔ dilan. Pɔnpe min bɛ kɛ ni fɛnɲɛnamafagalan ye, o bɛ kɛ walasa ka fɛnɲɛnamafagalan hakɛ dɔ mara. Ni gazi bɛ ka dɔgɔya ka taa a fɛ, fɛnɲɛnamafagalanw ni fɛnɲɛnamafagalanw walima ionw ka hɔrɔnya taamacogo fana bɛ bonya. Kuran-yɔrɔ ka fanga kɔrɔ, o ionw bɛ ɲɔgɔn Dòn ka Kɛ plasma (plasma) ye. O ionw bɛ se ka ɲɔgɔn sɔrɔ kosɛbɛ, fanga bɛrɛ bɛ u la ka se ka kemikɛli jɛɲɔgɔnya bɛɛ tiɲɛ, o bɛ kɛ sababu ye ka kemikɛli kɛ fɛn o fɛn na min bɛ kɛnɛ kan. Gazi plasma suguya wɛrɛw ka kemikaliya cogoya tɛ kelen ye. Misali la, oksizɛni plasma bɛ oksidan caman kɛ, a bɛ se ka fototalan oksidan kɛ walasa ka gazi bɔ, o la, a bɛ saniya nɔ sɔrɔ. Gazi sɔgɔlen plasma anisotropi ɲumanba bɛ a la, min bɛ etching ka ɲininiw dafa. Plasma furakɛli bɛ yeelen bɔ, o de y’a to a tɔgɔ dara ko yeelen bɔli.
Plasma saniyacogo bɛ tali kɛ fɔlɔ fɛnɲɛnamafagalanw "activation" de la plasma kɔnɔ walasa ka surface nɔgɔw bɔ. Farikoloɲɛnajɛ kɛcogo siratigɛ la, a ka c’a la, joli-sira-funu saniya bɛ nin wale ninnu kɛ: gazi minnu tɛ fɛnɲɛnamaw ye, olu bɛ wuli ka don joli-sira-funu cogo la; gazifɛnw bɛ sɔgɔ ka don fɛn gɛlɛnw kan; kulu minnu bɛ minɛ, olu bɛ ɲɔgɔn sɔrɔ ni mɔlikuluw ye minnu bɛ yɔrɔ gɛlɛn na walasa ka fɛn dilannenw molekiyɔmuw dilan; fɛn dilannenw mɔlikuluw bɛ tiɲɛ ka kɛ gazi fasa ye; ani farikoloɲɛnajɛ tolenw bɛ bɔ a sanfɛla la.

Plasma saniya fɛɛrɛ min nafa ka bon kosɛbɛ, o ye ko a bɛ se ka substrat suguya bɛɛ furakɛ, nɛgɛw, semiconducteurs, oxydes, ani polimɛri fɛn fanba i n’a fɔ poliporopilini, poliyesitɛri, poliimidi, polivini kuloridi, epoksi, ani hali politetrafluoroethylene. A bɛ se ka yɔrɔ bɛɛ saniya ani yɔrɔ kɛrɛnkɛrɛnnenw, ka fara fɛn gɛlɛnw kan.