RF Plasma minɛnw ka ɲɛsin Semiconductor baarakɛcogo ma

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RF Plasma Equipment for Semiconductor Applications ye saniya yɔrɔ kɛrɛnkɛrɛnnen ye min dabɔra semikɔndukiri pakew dilanni ni dugukolo sanfɛla furakɛli taabolo kɔrɔlenw kama. Minɛnw bɛ ni kabini barikama ye min dilannen don ni nɛgɛ ye min ka bon-, a labanna ni mugumugu ye min bɛ kɛ ni kurukuru-texture powder coating ye ni fini jɛman ye, o bɛ muɲuli ni izini cogoya saniyalen di. A ka bɔgɔdaga belebele dilannen don ni aliminiyɔmu saniyalenw ye minnu janya tɛ dɔgɔya milimɛtɛrɛ 25 ma, o bɛ kɛ sababu ye ka sigicogo ɲuman sɔrɔ ani ka jɔli sabati waati jan kɔnɔ. Kɔnɔna so bonya ye milimɛtɛrɛ 450 × 450 × 450 ye, a bɛ ni elekitorode plati kelen-dagalen ye min datugulen don kosɛbɛ, a janya ye milimɛtɛrɛ 410 × 430 ye. Baarakɛminɛnw bɛ bila ka ɲɛsin elekitorode plati ma, o min bɛ tali kɛ nɛgɛdaga basigilen na ni plug-in dilancogo ye, o bɛ garanti di plasma bɔli ɲuman ni sabatilen ma baara kɛtuma na.

O sitɛmu bɛ mara ni PLC plateforme ye, o bɛ sira di fɛn caman cili ma bololabaaracogo ni otomatiki dafalen cogoyaw cɛ. Baarakɛcogo bɛɛ bɛ se ka labɛn, ka ladilan, ka mara, ka kɔlɔsi waati yɛrɛ la. PID kunnafoni-falen-falen-minɛn min bɛ ɲɔgɔn kan, o bɛ sabatili ni tiɲɛni sabati ka taa a fɛ. Taabolo caman dilacogo bɛ se ka mara ani ka hakili jigin i n’a fɔ a mago bɛ cogo min na, o nafa ka bon kɛrɛnkɛrɛnnenya la sigidaw la minnu bɛ taabolo caman caman cili wajibiya. Vacuum system bɛ boli ni pɔnpe jalen ye, o bɛ pɔnpe teliya teliya di, ni a ka c’a la, so bɛ se vacuum hakɛ wajibiyalen ma segin 100 kɔnɔ.

RF Plasma Equipment inside for Semiconductor Applications

Fɛɛrɛko ɲɛfɔli kunbabaw ye plasma frequency 13,56 MHz ye, ni RF fanga bɛ se ka ladilan tuma bɛɛ ka bɔ 0 na ka se 600 W. Kuranba sɔrɔyɔrɔba bɛ jate 380 V AC (±10%), 50/60 Hz, saba{8}}fase duuru-wire system, ani minɛnw fanga bɛɛ lajɛlen bɛ dɔgɔya ni 3 kW ye. Gazi boli bɛ se ka labɛn tigitigi mililitiri 0 ni mililitiri 200 cɛ miniti kelen kɔnɔ walasa ka baarakɛcogo caman dɛmɛ.

Baarakɛcogo siratigɛ la, minɛnw jɔyɔrɔ ka bon kosɛbɛ semikɔndukiri pakew dilanni na, kɛrɛnkɛrɛnnenya la ka kɔn nɛgɛ sirili ɲɛ (W/B). Plasma saniya bɛ fɛnɲɛnama tolenw bɔ puwɛntiw la ka ɲɛ, ka a yɔrɔ baara, ani ka jisigicogo ɲɛ. O de kosɔn, sirili nɛgɛ nɔrɔli bɛ bonya, sirili fanga bɛ bonya, wa a bɔli farati bɛ dɔgɔya kosɛbɛ. Sisitɛmu bɛ baara kɛ ni fɛn caman ye ani kasɛti-cogo doni, o bɛ kɛ sababu ye ka baarakɛminɛn in bɛrɛbɛn ka kɛɲɛ ni a dilanni hakɛw ni a ɲininiw ye minnu tɛ kelen ye.

Ni a ka so dilancogo barikama, a ka kɔlɔsili tigitigi, ani a ka baarakɛcogo caman bɛ se ka wuli, nin RF plasma minɛn in bɛ fura dɔ di min bɛ se ka da a kan ani min bɛ se ka kɛ, walasa ka se ka sanfɛla furakɛli nɔ ɲumanw sɔrɔ, minnu bɛ se ka segin-ka-bɔ, semikɔndukiri dilanni na.

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